Kosaka Pickup Rotation Roundness Tester

Model EC5200

Parameter Specification
Rotating Method Unique Porous Static Air bearing
Rotational Accuracy (0) 0.05 µm
Rotational Accuracy (R) 0.15 µm
Rotational Speed 1 to 10 rpm
Table size 600 mm x 500 mm
Table Movement Range X + 300 mm, Y ± 70 mm
Centering Range 70 mm
Tilting Range ± 6 mm
Column Traverse Range 1000 mm
Radial Traverse Range 275 mm
Measuring Force 100 mN

Note: Customized model is also available on request