Kosaka Step Height Profile For Wafers In Semi Conductors
ET Series
| ET4000A | ET4000L | ET4100 | ET4300 | ET200 | |
| Stage size | 220x220mm | 540x400mm | 264x264mm | 310x310mm | ©160mm |
| Loading size | 210x210mm | 530x390mm | 260x260mm | 310x310mm | ©160mm |
| Detect range | 100um | 100um | 100um | 100um | 600um |
| X stroke | 100mm | 100mm | 258mm | 305mm | 100mm |
| Y stroke | 150mm (motorized) | 400mm (motorized) | 320mm (motorized) | 370mm (motorized) | +12.5mm (manual) |
| Straightness | 0.1um/100mm | 0.1um/100mm | 0.2um/100mm | 0.2um/100mm | 0.2um/100mm |
| Stylus force | 0.5-500uN | 0.5-500uN | 0.5-500uN | 0.5-500uN | 10 – 500uN |
| Typical purpose | 8 inch | A3 | 10 inch | 300mm | R&D |
